摘要
利用微滴预混转印装置并行合成了三元复合三氧化钨(WO_3)、氧化锡(SnO_2)以及氧化钴(Co_3O_4)的金属氧化物气敏膜;利用气敏材料高通量性能测试平台,使用程序降温方法对合成的气敏膜在乙醇气氛下进行测试。配套平台能够快速完成材料的"并行合成-高通量筛选",大幅提高了气敏材料的研发效率。实验获得了45种复合气敏膜在程序降温下的敏感度最大值,发现动态敏感度最大的是23号材料(WO_3,Co_3O_4,SnO_2为1︰2︰5),其对50×10^(-6)乙醇的动态响应高达-821.5(p型响应),充分说明了平台设备在气敏材料研发中的优势。
WO3/SnO2/Co3 O4 ternary composite gas sensor films are synthesized by a droplet pre-mixing transfer device. Synthesized gas sensor films are tested on a high throughput performance test instrument platform in ethanol atmosphere under programmed temperature cooling. The platform can quickly complete the process of ＂ parallel material synthesis and high throughput screening＂,which greatly improve the development efficiency of gas sensing materials. The maximum dynamic responses of 45 kinds of gas sensing films under the temperature program cooling are calculated. It is found that the maximum dynamic response came from the 23 rd material（ WO3︰Co3 O4︰SnO2=1︰2︰5）,whose dynamic response to the 50 × 10-6 ethanol is as high as-821. 5（ p-type response）. The experimental result shows the advantages of this equipment in the development of gas sensing materials.
作者
王永庆
张顺平
张春雷
杜妍
WANG Yong-qing;ZHANG Shun-ping;ZHANG Chun-lei;DU Yan(State Key Laboratory of Material Processing and Die ＆ Mould Technology, Huazhong University of Science and Technology, Wuhan 430074, China;Nanomaterial and Smart Sensor Research Laboratory, ttuazhong University of Science and Technology, Wuhan 430074, China;Shenzhen Institute of Huazhong University of Science ＆ Technology, S henzhen 518000, China)
出处
《传感器与微系统》
CSCD
2018年第6期52-55,共4页
Transducer and Microsystem Technologies
基金
国家自然科学基金资助项目(51204072)
深圳市基础研究项目专项基金资助项目(JCYJ20160506170101603)
广东省科技计划资助项目(2016A040403002)
关键词
气体传感器
金属氧化物
三元复合
高通量筛选
gas sensors
metal oxides
three component composite
high-throughput screening
