基于肖特基式场发射阴极的高分辨X射线显微技术开发进展

Development of high resolution X-ray microscopy based on schottky field emission cathode

X射线显微镜具有分辨率高、透视成像等特点,成为不可替代的无损检测手段。国外近年来出现了一种基于肖特基式场发射阴极的X射线显微镜,其分辨率可达0.1m以内。本文系统分析了该显微镜的工作原理,并对显微镜的未来发展趋势进行了展望。

X-ray microscope has become an irreplaceable nondestructive testing method with the characteristic such as high-resolution and X-ray imaging？ Abroad in recent years, there is an X-ray microscope based on schottky type of field emission cathode, its resolution achieves less than 0.1μm. This paper systematically analyzed the working principle of the system？ And also, the trend of future development of X-ray microscope is discussed？