氧化物功能薄膜材料在柔性传感器件中的应用

The application of functional oxide thin films in flexible sensor devices

柔性传感器件因其在医疗健康、人机交互等应用中的巨大前景,受到了广泛关注,也是近年来的研究热点.作为无机功能材料中的一类重要材料,氧化物功能薄膜因其具有丰富的电子学、光学、热学、力学、磁学等方面性质已经在各种电子和光电子器件中得到了广泛的应用.将氧化物功能薄膜应用于柔性传感器件,有望进一步提高柔性传感器件的性能,并为新型柔性传感器件的设计提供材料保障.本文分析了目前氧化物功能薄膜在柔性传感器件中应用所面临的重点科学技术问题,并介绍了近年来在基于氧化物功能薄膜的柔性传感器件所涉及的关键技术和器件应用上的研究进展.

With promising applications in healthcare and human-machine interaction,flexible sensor devices have drawn much attention and have been intensively studied in recent years.Meanwhile,functional oxide thin films,as one key family of inorganic functional materials,have been widely used in the electronic and optoelectronic devices because of their rich electronic,optical,thermal,and mechanical properties.Their application in flexible sensor devices is expected to pave the way for high-performance devices and the design of novel devices.In this review,the key scientific and technical issues that need to be solved to promote the application of functional oxide thin films in flexible sensor devices are summarized and recent research progress in this field is discussed.