摘要
针对某型超导薄膜滤波器制作完成后的频率偏离现象,借助激光对超导薄膜滤波器线条进行修剪,以修正超导滤波器的频率。结合仿真计算,滤波器修正后频率与设计值一致;其它指标仍能满足设计要求。借助激光修正超导薄膜滤波器频率,将显著降低对设计和工艺制作的高精度要求,可实现更高的成品率。
We developed a novel frequency correcting method for frequency deviation of superconducting film filters in this paper. The deviated frequency could be corrected precisely by laser trimming on the microstrip line. We carried out an experi- ment to correct the frequency and combined with simulation we got requirements of design. Based on a laser frequency correcting method, high precision requirements for the design, the process and fabrication could be practised, the production rate of super- conducting film filter was increased.
作者
丁晓杰
张梅
王曦雯
王生旺
左涛
Ding Xiaojie;Zhang Mei;Wang Xiwen;Wang Shengwang;Zuotao(Key Laboratory of Superconducting ＆ Electronic Technologies, CETC, Hefei 230088, China;The 16th Institute of CETC, Hefei 230088,China)
出处
《低温与超导》
CAS
北大核心
2018年第7期54-57,共4页
Cryogenics and Superconductivity
关键词
超导薄膜滤波器
激光
修剪
频率修正
Superconducting - thin - film filter
Laser
Trimming
Frequency correcting
