涡流传感器有限元仿真的研究与实施

Research and Implementation of Finite Element Simulation of Eddy Current Sensor

为了对涡流测量的电磁场分布有更加深刻的了解,分析空间磁场的约束方程,建立涡流传感器的有限元仿真模型,仿真分析空间中的磁场分布。仿真结果表明,淬火层的深度与探头线圈检测到的磁场呈一定的正比例关系,为设计传感器提供了指导。探头激励信号频率越低,能检测的淬火层深度越厚,但检测灵敏度随之降低。为了保证涡流检测传感器的灵敏度,检测探头的提离高度应该尽可能小。当检测线圈的高宽比为1时,传感器具有最优的检测效果。

In order to understand the electromagnetic field distribution of eddy current measurement, this paper firstly analyzes the constraint equation of space magnetic field.On this basis, the finite element simulation model of eddy current sensor is established, and the magnetic field distribution in space is simulated.The simulation results show that the depth of the quenching layer is positively proportional to the magnetic field detected by the probe coil, and provides guidance for the sensing design of the post.The lower the probe excitation signal frequency, the more depth of quenching depth can be detected, but the sensitivity of detection decreases.In order to ensure the sensitivity of the eddy current sensor, the detection probe should be kept as small as possible.When the width ratio of the detection coil is 1, the sensor has the best detection effect.