MEMS陀螺仪零偏温度特性分析及性能优化

Bias Temperature Characteristic Analysis and Performance Optimization of the MEMS Gyroscope

零偏温度漂移是MEMS陀螺仪主要误差源之一,对MEMS陀螺仪零偏温度漂移误差源进行了分析。检测电路中延时相位的漂移是引起MEMS陀螺仪零偏温度漂移的主要原因。自时钟技术基于锁相环原理,将MEMS陀螺仪的驱动频率作为锁相环参考频率。陀螺仪检测电路的系统时钟频率跟随MEMS陀螺仪驱动频率而变化,两者始终保持固定的比例关系,最大限度地消除了延时相位变化。使用自时钟技术,将MEMS陀螺仪零偏温度漂移减小为原来的2%。

The bias temperature drift is one of the main error origins of the micro-electromechanical system（MEMS）gyroscope.The error origins of the bias temperature drift of the MEMS gyroscope were analyzed.The drift of the delay phase in the detection circuit is the main reason of the bias temperature drift of the MEMS gyroscope.The self-clock technology is based on the phase-locked loop,making the driving frequency of the MEMS gyroscope as the reference frequency of the phase-locked loop.The system clock frequency of the gyroscope detection circuit will track with the driving frequency of the MEMS gyroscope with a fixed proportional relation toward each other all the time to eliminate the delay phase drift to the greatest extent.By the self-clock technology,the bias temperature drift of the MEMS gyroscope reduces to 2% of the original value.