AlN压电振动能量收集器的结构优化设计与实验

Structure optimization design and experiment of AlN piezoelectric vibration energy harvester

在整体尺寸不变的基础上,结合集总参数模型,利用ANSYS有限元软件对氮化铝(Al N)压电振动能量收集器的结构参数进行优化设计,得到压电悬臂梁单元的优化尺寸为5 mm×12 mm×0.05 mm。设计了工艺流程,加工了原理样机。经测试:在1 gn加速度,204.6 Hz谐振频率激励下,样机在最优化负载80 kΩ下的输出电压为2.3 V,输出功率为66.125μW,满足部分低功耗传感节点的供能要求。

On the basis of remaining overall size unchanged, combining with lumped parameter model, ANSYS finite element software is used for optimization desian of structural parameter, the optimal size of piezoelectric cantilever beam element is 5 mm × 12 mm × 0.05 mm. Technological process is designed and the principle prototype is fabricated successfully according to the optimal size. Test result shows that with an optimized load of 80 kΩ, the prototype possesses maximum output power of 66. 125μW and output voltage of 2.3 V at 1 g, acceleration, excited by resonant frequency of 204.6 Hz, which meets requirement of energy supply of partial low power consumption sensing nodes.