摘要
在整体尺寸不变的基础上,结合集总参数模型,利用ANSYS有限元软件对氮化铝(Al N)压电振动能量收集器的结构参数进行优化设计,得到压电悬臂梁单元的优化尺寸为5 mm×12 mm×0.05 mm。设计了工艺流程,加工了原理样机。经测试:在1 gn加速度,204.6 Hz谐振频率激励下,样机在最优化负载80 kΩ下的输出电压为2.3 V,输出功率为66.125μW,满足部分低功耗传感节点的供能要求。
On the basis of remaining overall size unchanged, combining with lumped parameter model, ANSYS finite element software is used for optimization desian of structural parameter, the optimal size of piezoelectric cantilever beam element is 5 mm × 12 mm × 0.05 mm. Technological process is designed and the principle prototype is fabricated successfully according to the optimal size. Test result shows that with an optimized load of 80 kΩ, the prototype possesses maximum output power of 66. 125μW and output voltage of 2.3 V at 1 g, acceleration, excited by resonant frequency of 204.6 Hz, which meets requirement of energy supply of partial low power consumption sensing nodes.
作者
周雅慧
温志渝
贺显明
路庄
陈永军
ZHOU Ya-hui;WEN Zhi-yu;HE Xian-ming;LU Zhuang;CHEN Yong-jun(nierosystem Research Center,Chongqing University,Chongqing 400044,China;National Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology,Chongqing 400044,China;College of Optoelectronic Engineering,Chongqing University,Chongqing 400044,China)
出处
《传感器与微系统》
CSCD
2018年第7期18-21,共4页
Transducer and Microsystem Technologies
基金
国家自然科学基金资助项目(61604023)
国家高技术研究发展计划("863"计划)资助项目(2015AA042603)
关键词
氮化铝
微机电系统
压电
能量收集器
aluminium nitride(AlN)
micro-electro-mechanical system(MEMS)
piezoelectric
energy harvester