应力隔离法在蓝宝石压力传感器结构设计中的应用

Application of stress isolation method in structural design of sapphire pressure sensor

对硅—蓝宝石硅压力传感器C型弹性膜片接头结构和E型弹性膜片接头结构进行建模分析,优化设计应力隔离槽结构,并应用于硅—蓝宝石压力传感器一体化设计的弹性膜片与接头结构。较好地解决了硅—蓝宝石压力传感器的零点输出、满量程输出在不对称安装应力下产生偏移,影响传感器的测量精度的问题,使传感器的安全性、可靠性进一步提高,优化结构后的传感器在航天领域具有广泛的应用。

The structure of C type elastic diaphragm joint of silicon-sapphire silicon pressure sensor and the structure of E type elastic diaphragm joint are modeled and analyzed, optimized design of stress isolating groove structure is applied to the structure of elastic diaphragm and joint of silicon-sapphire pressure sensor by integrated design. It solves the problem that zero-point output of silicon-sapphire pressure sensor and output of full range occur offset under asymmetrical installation stress, which affects measurement precision of sensor. Safety and reliability of sensor are further improved, and it has wide applications in the field of aerospace.