集成电路制造企业安全文化建设的探索

Exploration of Safety Culture Construction for Integrated Circuit Manufacturing Enterprises

集成电路制造工艺的特性,制程中的扩散、离子植入、化学气相沉积、蚀刻和光刻等工序中所使用的危险化学品,大多具有易燃性、可燃性、有毒性、腐蚀性等危害特性,给生产中带来了火灾、爆炸、中毒等潜在的高安全风险。成功的集成电路制造企业安全文化主要体现在健全的安全管理体制、有效的安全措施与制度的建设,以及通过各种方式培养员工警钟长鸣的"安全第一"的意识形态,这一点尤为重要。养成安全的思维方式、行为准则、道德观以及价值观等比硬性的规定更有长远的效用。

Because of the characteristics of integrated circuit manufacturing process, the hazardous chemicals used in the process of diffusion, ion implantation, chemical vapor deposition, etching and lithography are mostly combustible, combustible, toxic and corrosive, which bring high safety risks, such as fire, explosion and poisoning. Successful IC manufacturing enterprise safety culture is mainly reflected in the construction of safety management system, effective safety measures and systems. It is particularly important to cultivate the ＂safety first＂ ideology of employees＇ alarm bells through various ways. It is more effective to develop a safe way of thinking, a code of conduct, moral values and values than rigid rules.