4Bader M, Hall R, Strasser G. Integrated processing equipment[ J]. Solid State Technology, 1990,33 (5) : 149-154.
5Burggraaf P. Coping with the high cost of wafer fabs [ J ]. Semiconductor International, 1995,18 (38) :45-50.
6Newboe B. Cluster tools : a process solution [ J ]. Semiconductor International, 1990,13 (8) : 82- 88.
7McNab T K. Cluster tools, part 1 : emerging processes [ J ]. Semiconductor International, 1990,13 ( 9 ) : 58- 63.
8Singer P. The driving forces in cluster tool development[ J]. Semiconductor International, 1995,18 (8) : 113-118.
9Brauner N. Identical part production in cyclic robotic cells: concepts, overview and open questions [ J ]. Discrete Applied Mathematics, 2008,156 ( 13 ) :2480-2492.
10Crama Y, Kats V, van de Klundert J, et al. Cyclic scheduling in robotic flowshops [ J ]. Annals of Operations Research, 2000,96(1-4) :97-124.