扫描电子显微镜成像模式在金属材料研究中的选用

Imaging Mode Selection of Scanning Electron Microscope for Metal Materials Research

介绍了扫描电子显微镜的电子成像原理、特点及常见的3种信号探测器,分析了扫描电子显微镜成像技术中二次电子(SE)和背散射电子(BSE)信号与金属材料表面形貌、原子序数及晶体取向信息的表征关系。以经电子束表面处理不锈钢的熔坑、退火态球墨铸铁组织表征以及热扩渗40Cr钢渗层组织研究为例,详细阐述了普通SE、高分辨二次电子(In-Lens)及BSE三种成像模式在金属材料研究中的应用特点及选用。

The imaging mode principle,characteristics and three common signal detectors of the scanning electron microscope（ SEM） were introduced. The characterization relationship between secondary electrons（ SE）,backscattered electrons（ BSE） signals and surface morphology,atomicnumber and crystal orientation of metal materials in scanning electron microscope imaging techniques were analyzed. Application features and selection of three kinds of imaging mode： the ordinary SE,high resolution secondary electrons（ In-Lens） and BSE in the study of Metal Materials were fully described, taking research on craters of stainless steel after electron beam surface treatment,microstructure characterization of annealed ductile iron and thermal diffusion layer microstructure of40 Cr steel for examples.