摘要
介绍了扫描电子显微镜的电子成像原理、特点及常见的3种信号探测器,分析了扫描电子显微镜成像技术中二次电子(SE)和背散射电子(BSE)信号与金属材料表面形貌、原子序数及晶体取向信息的表征关系。以经电子束表面处理不锈钢的熔坑、退火态球墨铸铁组织表征以及热扩渗40Cr钢渗层组织研究为例,详细阐述了普通SE、高分辨二次电子(In-Lens)及BSE三种成像模式在金属材料研究中的应用特点及选用。
The imaging mode principle,characteristics and three common signal detectors of the scanning electron microscope( SEM) were introduced. The characterization relationship between secondary electrons( SE),backscattered electrons( BSE) signals and surface morphology,atomicnumber and crystal orientation of metal materials in scanning electron microscope imaging techniques were analyzed. Application features and selection of three kinds of imaging mode: the ordinary SE,high resolution secondary electrons( In-Lens) and BSE in the study of Metal Materials were fully described, taking research on craters of stainless steel after electron beam surface treatment,microstructure characterization of annealed ductile iron and thermal diffusion layer microstructure of40 Cr steel for examples.
作者
杨显
胡建军
郭宁
何川
张雨晴
王静
YANG Xian;HU Jianjun;GUO Ning;HE Chuan;ZHANG Yuqing;WANG Jing(College of Material Science and Engineering,Chongqing University of Technology,Chongqing 400054,China;Mould Technology Chongqing Municipal Key Laboratory of Institutions of Higher Education,Chongqing 400054,China;Faculty of Materials and Energy,Southwest University,Chongqing 400715,China)
出处
《重庆理工大学学报(自然科学)》
CAS
北大核心
2018年第7期132-137,共6页
Journal of Chongqing University of Technology:Natural Science
基金
国家自然科学基金资助项目(51575073)
国家国际合作专项(2015DFR70480)
重庆市科委资助项目(cstc2014gjhz70003
cstc2017jcyj BX0031)
重庆高校创新团队建设计划资助项目(CXTDG20162017)