低剂量率辐照损伤增强效应的高温辐照加速试验机理研究

Research on Mechanism of Elevated Temperature Irradiation Accelerated Test for Enhanced Low Dose Rate Sensitivity

本文建立了包含温度场的低剂量率辐照损伤增强效应(ELDRS)的物理模型,利用有限元方法仿真了辐照温度、剂量率、总剂量和辐射感生产物浓度的相互关系,分析了工艺参数,如氧化物陷阱浓度、能级,含H缺陷浓度及界面陷阱钝化能对最佳辐照温度的影响。结果表明,最佳辐照温度是辐射感生产物产生与退火相互竞争的结果,且辐射感生产物的退火行为是决定最佳辐照温度的主要因素,因此氧化物陷阱的热激发能及界面陷阱的钝化能对最佳辐照温度的影响最为明显,是不同器件最佳辐照温度差异性的主要原因。

A physical model of enhanced low dose rate sensitivity（ELDRS）including temperature field was established,and the relationship among the irradiation temperature,dose rate,total dose and the concentration of radiation induced product was given using the finite element simulation.The effect of process parameters（such as the concentration and energy level of oxide trap,the concentration hydrogen defect and the passivation energy of interface trap）on the optimum irradiation temperature was analyzed.The results show that the optimum irradiation temperature is the competition result between the generation and annealing of irradiation induced product.The annealing behavior is the main factor to determine the optimum irradiation temperature,so theactive energy of oxide trap and passivation energy of interface trap have obvious affection on the optimum temperature.The active energy of oxide trap and passivation energy of interface trap are the main reason for the difference of optimum irradiation temperature of different devices.