摘要
通过实例介绍了微区分析仪器电子探针(EPMA)在金属材料测试中的表征和应用效果。结果表明:EPMA可直观地显示合金表面渗层元素的含量及分布情况、腐蚀后各元素对应的分布特征、不同热处理工艺下铝合金中锌元素的面分布特征及碲元素在镍基合金表面渗碲过程的扩散形貌;EPMP在产品检测、失效分析、工艺优化、基础研究等方面都能发挥效用。
The characterization and application effect of electron probe micro-analyzer（EPMA）in metal materials test were introduced through examples.The results show that EPMA could directly displayed the content and distribution of the surface layer elements of the alloy,the distribution characteristics of the corresponding elements after corrosion,the mapping distribution characteristics of the zinc elements in the aluminum alloy under different heat treatment processes and the diffusion morphology of tellurium element during the process of tellurium permeation on the surface of the nickel-base alloy.EPMA can play a role in product test,failure analysis,process optimization,fundamental research and so on.
作者
赵同新
吉见聪
加藤治彦
小野卓男
ZHAO Tongxin;SATOSHI Yoshimi;HARUHIKO Kato;TAKUO Ono(Analysis Center of Shimadzu China Co.,Ltd.,Shanghai 200233,China;Global Application Development Center of Shimadzu Corporation,Kyoto 604-8511,Japan)
出处
《理化检验（物理分册）》
CAS
2018年第7期504-507,共4页
Physical Testing and Chemical Analysis(Part A:Physical Testing)
关键词
电子探针
成分分析
产品检测
失效分析
工艺制定
基础研究
electron probe micro-analyzer
component analysis
product test
failure analysis
process formulalion
fundamental research
