摘要
为了预测体声波谐振器(BAWR)的热行为并评估其功率容量,提出一种BAWR热行为仿真方法。首先提取BAWR电磁模型中的导体表面损耗,并以此作为热仿真的热源,得到谐振器的温度分布。然后就信号馈送边、有源区形状、功率容量这3方面进行了研究。仿真结果表明,为了减弱BAWR的自热效应,信号馈送宜遵循"长边馈入、长边馈出"原则;有源区形状对自热效应影响甚小;所设计的BAWR功率容量可达3 W。
In order to predict the thermal behavior of bulk acoustic wave resonator（BAWR） and evaluate the power handling capacity,a BAWR thermal behavior simulation method is proposed.Firstly,the surface loss of the conductor in the BAWR electromagnetic model is extracted and used as a heat source for the thermal simulation to obtain the temperature distribution of the resonator.Then the signal feeding edge,active area shape and power handling capacity are investigated.The simulation results show that,in order to weaken the self heating effect of BAWR,the signal feeding should follow the principle of “long edge feed in,long edge feed out”;the shape of the active area has little effect on the self heating effect,and the power handling capacity of the designed BAWR can reach 3 W.
作者
韩超
高杨
张大鹏
HAN Chao;GAO Yang;ZHANG Dapeng(School of Information Engineering,Southwest University of Science and Technology,Mianyang G21010,China;Institute of Electronic Engineering,CAEP,Mianyang G21999,China;State Key Laboratory of Particle Detection and Electronics,Institute of I Iigh Energy Physics,Chinese Academy of Sciences,Beijing 100049,China)
出处
《压电与声光》
CAS
CSCD
北大核心
2018年第4期507-510,515,共5页
Piezoelectrics & Acoustooptics
基金
国家自然科学基金资助项目(61574131)
中国工程物理研究院超精密加工技术重点实验室基金资助项目(2014ZA001)
核探测与核电子学国家重点实验室开放课题基金资助项目(2016KF-02)
关键词
体声波谐振器
自热效应
信号馈送边
功率容量
有源区形状
bulk acoustic wave resonator（BAWR）
self heating effect
signal feeding edge
power handling capacity
active area shape
