基于无衍射光的三自由度误差测量方法

A Method of Three-Degree-of-Freedom Measurement Based on Non-Diffracting Beam

【目的】采用轴锥镜产生无衍射光作为光源,提出了一种基于无衍射光的3自由度误差测量方法。【方法】测量部分由1面反射镜和2面分光镜组成,并固定于可以在3个自由度上转动的工作台上。工作台转动产生的3种角度偏差(偏摆角、俯仰角和滚转角)将造成2个不同位置处CCD接收到的光斑中心位置发生变化。【结果】通过理论分析得出了3种角度误差对应的变化量,并给出了模拟和实验结果。【结论】实验结果和模拟得到的理论值相一致,表明该方法能准确测量3自由度误差。

[Purposes]A method for three-degree-of-freedom measurement based on non-diffracting beam is put forward.Non-diffracting beam is adopted as light source which is generated by an axicon.[Methods]The measuring part is formed by one reflecting mirror and two beam splitters which are fixed on a stage of three-degrees-of-freedom.The rotational errors（pitch,yaw and roll errors）result in the variation of beam center positions in two separate CCDs.[Findings]Theoretical analysis about the variation with different rotational errors is made,experimental results and simulated results are given.[Conclusions]Experimental results agree well with simulated results,which show that the proposed method is accurate for measuring three-degrees-of-freedom errors.