X光光刻工艺微针阵列的制备、测试和仿真

Fabrication,testing and simulation of microneedle array based on X-ray lithography

为了提高透皮给药的效率,降低传统注射对人体的疼痛感,需要制备微针阵列结构。本文介绍了一种新的微针阵列结构的制造技术。利用日本立命馆大学的同步辐射光源AURORA进行两次X光移动光刻和一次固定X光光刻技术,在PMMA光刻胶上得到微针阵列。通过采用不同的掩膜版图形以及对不同位置的空心孔进行X光光刻,获得了不同规格的空心微针阵列,针对固定X光光刻时对准的问题,自行研制了X光光刻对准装置,实验结果证明,该装置能实现空心微针阵列的制备。并且进行了微针刺穿测试,结果证明微针有足够的强度。为了达到低成本批量复制微针阵列的目的,还进行了微针模具的倒模和复制实验,成功得到金属镍实心微针阵列。最后,针对光刻过程中微针阵列结构的侧面形状发生畸变的情况,对移动X光光刻建立了仿真预测,将仿真预测结果与实验结果进行了比较,结果表明显影深度的误差为5%。

In order to improve the efficiency of transdermal drug dilivery and reduce the pain of traditional injection on the human body,the microneedle array is needed.In this paper,the fabrication technique for microneedle array was introduced.A microneedle array was obtained on a polymethylmethacrylate（PMMA）substrate by using two moving X-ray lithography and alignment Xray exposure process using the synchrotron radiation source AURORA of Japanese Ritsumeikan University.A hollow microneedle array was fabricated.The different specifications had been successfully fabricated by using different mask pattern and X-ray lithography for different hollow positions.X-ray lithography alignment device had been developed for the problem of alignment during fixed X-ray lithography.The experimental results show that the device could achieve the preparationof hollow microneedle array.Then,the piercing text was carried out,and the results showed that the microneedle had enough strength.Besides,in order to achieve the goal of low cost batch replication of microneedle array,the reverse mold and replication experiments of microneedle array were also carried out,and the Ni solid microneedle array was successfully manufactured.Finally,in view of the distortion of the side shape of the microneedle array structure during the process of X-ray lithography,the simulation prediction was established for the moving X-ray lithography,the simulation prediction results were compared with the experimental results.The results showed that the simulation error of developing depth was 5%.