X-RAY高精度检测锂离子电池技术研究

Research of X-ray High-precision Detection Technology for Lithium-ion Battery

文章分析了国内外光电检测技术在半导体行业应用研发的现状,结果发现,目前国内外只能进行卷绕电池X-RAY检测,而缺少叠片电池检测。在此基础上,特别阐述了X-RAY检测技术在3D封装过程内部缺陷检测的应用研究进展、利用X-RAY检测技术检测锂离子电池内部缺陷的原理及其算法。结果表明,正是因为X-RAY对物体内部结构不同材料吸收各异,导致吸收后的成像也不同,从而进行内部缺陷检测,在工业探伤与检测、医学检查和安全检验等领域已得到广泛应用,但面向极大规模集成电路新工艺还有许多技术难题需要突破。

The present research of the photoelectric detection technology at home and abroad application in the semiconductor industry is analyzed. It is found that winding batteries only are detected using X-ray and lack of laminated batteries all over the world. On this basis,the application research progress of the detection technology by X-ray especially expounds with internal defects detection in 3 D encapsulation process. The principle and algorithm using X-ray inspection technology of internal defects in lithium ion batteries are also introduced. The results show that the image after absorption is precisely different because of X-ray absorb different materials of that internal structure of an object,so that the internal defect detection is carried out. The technology has been widely apply in that fields of industrial flaw detection and detection,medical inspection,safety inspection and other fields. There are still many technical problem to be solved for facing huge scale integrated circuit technology.