拟合阶次对基于多项式拟合的相位—高度映射关系的影响

Effect of Fitting Order on Phase-height Mapping Based on Polynomial Fitting

相位—高度映射系统标定对相位测量轮廓术三维重建与检测的精度起到决定性的作用,主要研究拟合阶次对基于多项式拟合的相位—高度映射系统标定精度的影响。通过1~6阶次的多项式拟合标定和三维高度重建,发现拟合阶次为1~4时可以取得较好的高度重建精度(绝对误差Δ<5μm)。对1~4阶次的多项式拟合标定系数进行进一步地研究分析,并发现当拟合阶次为2时,拥有较高的重建精度(绝对误差:Δ=1.36μm;相对误差:δ=1.34%)和稳定性(平均标准差:σ=0.262)。

The calibration of phase-height mapping system plays a decisive role in the accuracy of three-dimensional reconstruction and detection of phase measurement profilometry. The influence of fitting order on the calibration accuracy of phase-height mapping system based on polynomial fitting is mainly studied. Through the calibration of one to six orders polynomial fitting and three-dimensional height reconstruction, it is found that the fitting height of one to four orders can achieve a good height reconstruction accuracy, and the absolute error Δ is less than 5 μm.The polynomial fitting calibration coefficients of one to four orders are further studied and analyzed. It is found that when the fitting order is two, it has higher reconstruction accuracy and stability, and the absolute error Δ is 1.36 μm the relative error δ is 1.34% and the standard deviation σ is 0.262.