基于螺旋扫描的表面三维形貌快速测量

Rapid measurement of three-dimensional topography on surface based on spiral scanning

为实现精密表面三维形貌的快速测量,提出一种螺旋式扫描测量方法.首先,基于x、y、z向直线运动平台、DD马达旋转平台以及激光位移传感器,搭建三维形貌测量系统,其中被测试件表面形貌的平面位置信息通过x向平台与DD马达同步运动所形成的螺旋扫描运动来获得,被测试件表面形貌的高度信息由激光位移传感器来获得;然后,基于所搭建的测量系统,对表面形貌为凸凹扇形的圆形试件的表面进行测量.结果表明:测量直径为15 mm的圆形区域所用的时间为420 s,能较好地实现被测试件表面形貌的快速测量.

A spiral scanning measurement method is proposed in order to realize rapid measurement of the three-dimensional topography of the precision surface. First of all, a three-dimensional topography measurement system is setup based on x, y, z linear motion platform, DD motor rotation platform and laser displacement sensor. the plane position information of the specimen＇s surface morphology is obtained by the spiral scanning formed by x platform and DD motor synchronous motion, at the same time the height information of the specimen＇s surface morphology is obtained by laser displacement sensor. Then, based on the built threedimensional topography measurement system, a circular specimen with convex and concave fan shaped surface is measured. The results show that when the measured circular area of diameter is（37）15 mm, the total time is 420 s, so the spiral scanning measurement method can better realize rapid measurement of surface topography of the specimen.