多弧离子镀制备纳米多层TiAlSiN涂层的性能研究

Study on Properties of Nano-multilayer TiAlSiN Coating Prepared by Multi-arc Ion Plating

采用多靶阴极电弧离子镀系统在硬质合金基体上沉积纳米多层结构的Ti Al Si N硬质涂层,该结构是通过Ti Al N涂层与Ti Si N涂层的交替叠加而制备的。实验同时制备了Ti Al N涂层、Ti Al Si N单层涂层与纳米多层涂层进行性能对比分析,用扫描电镜(SEM)、EDS对涂层结构形貌及成分进行了分析,用划痕法和纳米压痕法分别对涂层的结合力与纳米硬度进行了测试,同时也测试了涂层在不锈钢车削上的性能表现。结果表明,Ti Al Si N纳米多层涂层硬度高达33 GPa,同时在不锈钢车削上以Ti Al Si N纳米多层涂层性能最优,而Ti Al Si N单层涂层性能最差。

A nano-multilayer Ti Al Si N hard coating is deposited on a cemented carbide substrate by a multi-target cathodic arc ion plating system. The structure is prepared by alternating stacking of Ti Al N coating and Ti Si N coating.The performance comparison of Ti Al N coating, Ti Al Si N single layer coating and nano multilayer coating is carried out.The morphology and composition of the coating are analyzed by scanning electron microscopy（SEM） and EDS. The adhesion and nanohardness of the coating are tested by the scratch method and the nanoindentation method, and the performance of the coating on the stainless steel turning is also tested. The results show that the hardness of Ti Al Si N nano-multilayer coating is as high as 33 GPa, and the performance of Ti Al Si N nano-multilayer coating is the best in stainless steel turning, while the performance of Ti Al Si N single-layer coating is the worst.