关于微弱电容传感信号读取电路技术的探讨

Discussion on Reading Circuit Technology of Weak Capacitive Sensing Signal

近几年微机电系统发展迅猛,微电容传感器的电容信号更加薄弱,其检测技术已经成为了电容式传感器发展和应用的瓶颈。因此,微弱电容传感信号读取电路技术成为了人们关注的焦点。本文主要对微弱电容传感信号的检测方法、基于TDC微弱电容传感信号读取电路技术设计的问题进行研究。

The micro electro mechanical system has developed rapidly in recent years,and the capacitance signal of the micro capacitance sensor is weaker. Its detection technology has become the bottleneck of the development and application of the capacitive sensor. Therefore,the weak capacitance sensing signal reading circuit technology has become the focus of attention. This paper mainly focuses on the detection methods of weak capacitive sensing signals and the design of reading circuit technology for weak capacitance sensing signals based on TDC.