半漏磁冷场电镜观测铁磁性材料的途径

Solution of ferromagnetic materials observation on FESEM with semi-magnetic lense

冷场发射扫描电镜一般采用半漏磁物镜设计和in-lence探头相结合的技术成像,以提升图像质量。漏磁场极容易造成对磁性样品的吸附而损伤物镜,致使冷场发射扫描电镜不适用于磁性材料的观测;并且利用观测普通材料的实验参数也无法获得理想图片。通过设计新型样品台,同时改良实验参数和操作方法,突破了冷场扫描电镜对磁性材料限制。

In order to improve the quality of the picture,semi magnetic lens plus in-lense SEI detector is usually used on FE-SEM.Meanwhile,it brought a problem that it is very easy to damage the lense because of the adsorption. It is also difficult to obtain the ideal image under common experimental parameters for ferromagnetic materials observation. This paper discussed a new path to solve the technical problem by designing a new type sample holder and setting certain experimental parameters.