退火工艺对太阳能多晶硅硬质点的影响

Effect of Annealing Process on Hard Spots of Solar Polysilicon

太阳能多晶铸锭采用的是定向凝固多晶铸锭法。硬质点是太阳能多晶硅锭的一个致命缺陷,直接影响着后道工序的正常生产,这就需要在铸锭过程中对退火工序进行改善。就此详细论述了退火时间、退火温度对硬质点及成品率的影响,以寻求一个最佳的工艺参数来提高生产成品率,降低生产成本。

The directionally solidified polycrystalline ingot method is adopted in the solar polycrystalline ingot. The hardpoint isa fatal defect of the solar polysilicon ingot, which directly affects the normal production of the post process,and requires the improvement of the annealing process in the process of ingot casting. The effects of annealing timeand annealing temperature on hard spots and yield are discussed in detail in order to find the best process parametersto improve the production rate and reduce the cost of production.