类金刚石膜超低摩擦行为的研究进展

Current Development Situation of Superlow Friction Behavior of DLC Films

近年来,高硬度、低摩擦、高耐磨性的类金刚石(Diamond like carbon,DLC)膜引起了国内外学术界和工业界极大的研究兴趣,尤其是它的超低摩擦行为。首先从宏观和微观角度分析了DLC膜超低摩擦的起源,研究发现DLC膜的微观结构和测试环境是影响DLC膜实现超低摩擦的主要因素,而DLC膜的微观结构由其制备工艺决定。然后系统讨论了制备工艺(包括制备方法、反应气源、掺杂元素和基体材料等)和测试环境(包括真空与干燥惰性气体环境、潮湿环境、高温环境、载荷和滑动速度等)对DLC膜超低摩擦行为的影响规律。最后归纳分析了目前对DLC膜超低摩擦机理的几种解释,指出DLC膜作为超低摩擦材料仍需解决的问题及未来的研究趋势。

Diamond-like carbon（DLC） films with high hardness, low friction coefficient and high wear resistance have attracted great research interests in the industry and research community in recent years, especially in superlow friction behavior. First, the origin of superlow friction of DLC films were analyzed in macro and micro views. It is found that superlow friction of DLC films are attributed to the microstructure of DLC films and the testing environments of the tribotests.Moreover, the microstructure of DLC films are dependent on the preparation process of DLC films. Then, the effects of the preparation process（including the deposition methods, source gases, element doping, and substrate materials） and the friction conditions（including vacuum, dry inert gas, humid and high temperature environment, load, and sliding velocity） on superlow friction behavior of DLC films were discussed systematically. Finally, the tribological mechanisms of superlow friction of DLC films were summarized, and the unresolved problems and development trend of DLC films used as superlow friction material were pointed out as well.