气溶胶喷墨打印工艺参数对图案精度的影响

Influences of Aerosol Inkjet Printing Process Parameters on the Pattern Accuracy

以商业纳米银颗粒墨水为打印材料,以钠钙玻璃为衬底材料,采用气溶胶喷墨打印工艺在衬底上打印形成银线。在搭建的气溶胶喷墨打印平台上,通过改变工艺参数探究不同工艺参数对银线线宽的影响规律。通过激光共聚焦显微镜对打印图案进行测量与观察发现：增大环绕气体流量、减小输送气体流量可以降低银线线宽;增大气体流量比可以在减小打印线宽的同时减小铺展现象,但会出现卫星液滴问题与沉积空洞现象;提高打印速度也可以有效抑制铺展现象;最后在钙钠玻璃衬底形成了平均电阻率为24.93μΩ·cm的导电金属电极图案。

With the commercial silver nanoparticle ink as the printing material and sodium calcium glass as substrate material,the silver line was printed on the substrate by the aerosol inkjet printing process.On the aerosol inkjet printing platform,the influence rules of different process parameters on the width of the silver line were explored by changing printing process parameters.The printed pattern was measured and observed by the laser confocal microscope.The result shows that the width of the silver line can be reduced by increasing the surrounding gas flow and decreasing the transportation gas flow.Besides,the printing line width and spreading phenomenon can be reduced at the same time by increasing the gas flow ratio,but the satellite droplet problem and deposition hole phenomenon will appear.Increasing the printing speed can also effectively inhibit the spreading phenomenon.Finally,the conductive metal electrode pattern with a mean resistivity of 24.93μΩ·cm was formed on the calcium sodium glass substrate.