气悬浮平台的电流滞环控制研究

Study on Current Hysteresis Control of Air Suspension Platform

气悬浮运动系统的面向玻璃基板减小了电机摩擦力的影响,在非接触式传输领域具有磨损小、寿命长、污染低、速度高、精密度高等特点,在高加速度高速度精密加工装备领域中应用得越来越多。要满足速度和精度的要求,这样就需要气悬浮平台产生平稳的推力,而平台平稳的推力取决于直线电机得到平滑的圆形磁链,电机的定子三相电流有越高的正弦度,推力就会越平稳。对系统运用电流滞环控制可以使定子三相电流跟随给定的三相电流,使得定子三相电流严格的正弦,从而得到平滑的圆形磁链以及平稳的推力。

The glass substrate gas suspension movement system can reduce the influence of friction force in the motor,applications in high speed high speed precision machining equipment in the field.To meet the requirements of speed and accuracy,this paper need a smooth thrust for the air suspension platform,and the steady thrust of the platform depends on the smooth circular flux linkage of the linear motor.The higher the sinusoidal degree of the stator＇s three-phase current,the more stable the thrust will be.The current hysteresis control of the system can make the stator three-phase current follow a given three-phase current,making the stator three-phase current strictly sinusoidal,thereby obtaining a smooth circular magnetic linkage and a smooth thrust.