小型磁偏转质谱计性能实验研究

Performance Study of Miniature Magnetic Sector Mass Spectrometer

自主研发了小型磁偏转质谱计,并对其质量范围、分辨本领、灵敏度和最小可检分压力四个主要性能指标进行了实验测试和比对。结果表明,该质谱计的质量范围为(1~143)amu,相对N2的分辨本领为1400,灵敏度为4.2×10^(-5)A/Pa,最小可检分压力为9.5×10^(-7)Pa。该测试和比对结果为磁偏转质谱计进一步的优化设计和性能提高奠定了重要基础。

A new Miniature Magnetic Sector Mass Spectrometer has been developed. The key performance indexes of the instrument were tested and compared including mass range,resolution,sensitivity and the minimum detectable partial pressure. The result shows that the mass spectrometer can record mass range from 1 to 143 amu. The instrument provides resolving power of about 1400 at full width half maximum（ FWHM） and demonstrates an sensitivity of 4.2×10^（-5） A/Pa for nitrogen. And the minimum detectable partial pressure is measured to be 9.5×10^（-7） Pa. The results lay a solid foundation for the further performance improvement of magnetic sector mass spectrometer in the future.