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上称重自控径晶体生长直径突变的研究

Study on Diameter Variation of Crystal Growth on Weighed Auto-control Diameter
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摘要 使用上称重自动控径单晶炉生长Nd:YAG晶体时,按设计的参数自动控径生长出的晶体在等径下部2/3处发生直径突变,由此引发晶体下端内部出现裂纹、包裹物等严重缺陷,影响了晶体的可用性,降低了生产效率,增加了生产成本。通过采用适当的减小晶体生长直径,降低感应加热线圈和坩埚口的相对高度,连续变转速的方法,成功解决了晶体等径生长后期直径突变的问题,对自控径生长大直径晶体具有指导意义。 When the Nd: YAG crystal is grown using automatic diameter control single crystal furnace,the diameter of the crystal grown by the automatic diameter control is abruptly changed at the lower two-thirds of the equal diameter,which causes serious defects such as cracks and wraps inside the crystal. Affects the availability of crystals,reduces production efficiency,and increases production costs. By appropriately reducing the growth diameter of the crystal,decreasing the relative height of the induction heating coil and the crucible,and continuously changing the rotational speed,the problem of the abrupt change in the later diameter growth of the crystal has been successfully solved,which has the guiding significance for the growth of the large diameter crystal with the self-control diameter.
作者 金宁昌 权纪亮 柯观振 马原原 黄晋强 郭勇文 Jin Ningchang;Quan Jiliang;Ke Guanzhen;Ma Yuanyuan;Huang Jinqiang;Guo Yongwen(Guangzhou Semiconductor Material Research Institute,Guangzhou 510610,China)
出处 《山东化工》 CAS 2018年第15期110-111,共2页 Shandong Chemical Industry
关键词 上称重 自动控径 晶体生长 直径突变 upper weighing automatic diameter control crystal growth diameter nmtation
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