无阀气体压电泵仿真分析与实验

Simulation Analysis and Experiment of Valve-Less Gas Piezoelectric Pump

为了提高微型泵输出流量以及获得连续出流能力,设计了一种基于合成射流原理的无阀气体压电泵。首先,分析了压电气泵的工作原理,测试了压电振子的振幅;其次,利用CFX软件对无阀气泵进行仿真分析,得到压电气泵在0T,1/4T,2/4T和3/4T时刻的气体流速分布,以及容腔高度、泵腔高度、射流孔直径和出口直径对气泵流量的影响规律;最后,制作了无阀气体压电泵的实验样机。测试结果表明,当无阀压电气泵在驱动电压为120V、驱动频率为400Hz、容腔高度为0.1mm、泵腔高度为1.4mm、射流孔直径为1.3mm和出口直径为2mm时,泵输出气体流量为1800ml/min左右,实验与仿真分析基本吻合。该气泵能输出较大气体流量并具有连续出流的能力。

A valve-less gas piezoelectric pump based on synthetic is designed for continuous flow and the output flow rate increasing.First,the working principle of the gas piezoelectric pump is presented and the amplitude of the piezoelectric vibrator is measured.Then,the distribution of gas velocity at different moments(for 0 T,1/4 T,2/4 T,3/4 T)is obtained by simulation analysis of the valve-less gas piezoelectric pump with CFX software.Besides,the influences on the pump flow from the cavity height,pump cavity height,jet orifice diameter and outlet diameter are studied.Finally,the experimental prototype of valveless gas piezoelectric pump is fabricated.The valve-less gas piezoelectric pump has the cavity height of0.1 mm,the pump cavity height of 1.4 mm,the jet orifice diameter of 1.3 mm,and the outlet diameter of2.0 mm.When driven at a voltage of 120 V,400 Hz,the output flow is 1 800 ml/min.The experimental results agree with those of the simulation.The pump increases the gas flow,and is able to continuously output flow.