地平式离轴扩束光学系统装调技术

Assembly technology of alt-az off-axis beam expanding optical system

为实现地平式离轴扩束光学系统的高精度装调,利用4D干涉仪加装平面镜头配合标准平面镜实现自准直检测,并针对实际使用过程中镜筒需要绕俯仰轴旋转的问题,提出一种动态检测方法。根据实际装调结果,建立空间直角坐标系,利用旋转过程中光斑最大偏离量计算二轴正交误差。装调结果表明,采用自准直检测及动态检测方法,主镜面形精度为0.028 8λ@632.8nm,系统波像差RMS为0.131λ@632.8nm,二轴正交误差为2.06″。

In order to realize high-precision assembly and adjustment of alt-az off-axis beam expanding optical system,the 4 Dinterferometer was used to add plane lens matching the standard plane mirror to achieve self-collimation detection,and a dynamic detection method was proposed aiming at the problem of the tube needing for rotating around the pitch axis in actual.According to the actual assembly results,a space rectangular coordinate system was established,and the quadrature error of the two axes was calculated by using the maximum deviation of spot in rotation process.The results show,using this self-collimation detection and dynamic detection method,the surface figure accuracy root-mean-square（RMS）of primary mirror is 0.028 8λ@632.8 nm,the wave aberration RMS of the optical system is0.131λ@632.8 nm,and the error of the two-axis orthogonality is 2.06″.