双晶片悬臂梁式压电传感器的有限元仿真研究

Finite Element Simulation of Piezoelectric Sensor of Bimorph Cantilever

压电传感器作为一种便捷、高效的传感器类型,越来越受到人们的青睐。为研究压电传感器机电耦合能力,将压电高聚物聚偏氟乙烯(PVDF)黏结而成的压电双晶片悬臂梁作为研究对象,利用有限元分析软件ANSYS Workbench,首先完成对模型的构建和模态分析,得出模型的固有频率和固有振型,再建立压电材料的压电本构方程,对压电双晶片悬臂梁模型发电量进行模拟仿真,最后将仿真结果与前人研究结果相对比。分析得出:在10 mm的形变量下,能够产生最大320 V左右的瞬时电压,这与前人的研究结果相近,验证了仿真结果的准确性,同时也证实了压电双晶片悬臂梁作为压电传感器的可行性。

As a convenient and efficient type of sensor, piezoelectric sensor is more and more popular. In order to study the electromechanical coupling of piezoelectric sensors, the piezoelectric bimorph cantilever beam bonded by piezoelectric polymer polyvinylidene fluoride（PVDF） was taken as the study object, the finite element analysis software ANSYS workbench was used. Firstly, the model construction and modal analysis were completed, the natural frequency and the natural mode of the model were obtained. Then, the piezoelectric constitutive equation of the piezoelectric material was established, and the the power generation of the piezoelectric bimorph cantilever beam model was simulated. Finally, the simulation results were compared with those of previous studies. The results show that under the deformation of 10 mm, the instantaneous voltage of 320 V can be approximated, which is similar to the results of previous studies, and proves the accuracy of the simulation results again. It also confirms the feasibility of piezoelectric double-chip cantilever beam as a piezoelectric sensor.