微细超声加工机床关键零部件设计

Key Components Design of Micro Ultrasonic Machining Machine Tool

微细超声加工机床是实施微细超声加工的基础。针对微细超声加工的原理,对微细超声加工机床中的关键零部件进行了设计,包括主轴设计、微细超声振动工作液槽设计、运动控制系统硬件设计与数据采集系统硬件设计。块电极通过辅助夹具安装于微细超声振动工作液槽中,能够实现微细工具电极的在线加工。采用双超声振动系统设计结构,可以根据加工需要自由的选择将微细超声振动施加到工具或者工件上。宏微复合的运动控制模式能有效的保证运动控制精度,加工实时力与机床运动结合形成的闭环结构能满足微细超声加工中的恒力进给需求。

Micro ultrasonic maching machine tool is the basis of the implementation of micro ultrasonic machining. According to the principle of the micro ultrasonic machining,the key components of the machine tool was detailly designed in this paper.It contains a spindle design,a working liquid groove with micro ultrasonic vibration,a hardware design of motion control system and a hardware design of data acquisition system. The block electrode was fixed in the working liquid groove with micro ultrasonic vibration by auxiliary fixture,which was used to realize the on-line machining of micro tool electrode. The design structure of double ultrasonic vibration system can easily choose utrasonic vibration applied to the tool or the workpiece according to the machining needs. Motion control mode with macro and micro composite can effectively ensure the accuracy of motion control,closed-loop structure of the real time machining force combine with machine tool motion can meet the demand of constant force feed in micro ultrasonic machining.