波长色散X射线荧光光谱仪的检定

Verification of wavelength dispersive X-ray fluorescence spectrometer

介绍波长色散X射线荧光光谱仪的检定方法。以ZSX PrimusⅡ型波长色散X射线荧光光谱仪为实例,对仪器性能测试和计量检定流程进行了详细说明。波长色散X射线荧光光谱仪的总不确定度分别由精密度测量不确定度,稳定性测量不确定度,X射线计数率测量不确定度,检测器能量分辨率不确定度,仪器计数线性的不确定度组成。对仪器的各不确定度分量进行评定。在置信水平95%,扩展因子为k=2的条件下,计算得此波长色散X射线荧光光谱仪的标准扩展不确定度为1.45 kcps。该方法为检定该类仪器和计量标准的考核提供了参考。

The verification method of wavelength dispersive X-ray fluorescence spectrometer was introduced. The performance test and metrological verification process of instrument were described in detail by using ZSX Primus Ⅱ wavelength dispersive X-ray fluorescence spectrometer as an example. The total uncertainty of wavelength dispersive X-ray fluorescence spectrometer was composed of uncertainty of precision measurement, uncertainty of stability measurement, uncertainty of X-ray counting, uncertainty of energy resolution of detector and uncertainty of instrument count linear. The uncertainty component of the instrument was evaluated. Under the condition that the confidence level was 95%（k=2）, the standard expand uncertainty of this wavelength dispersive X-ray fluorescence spectrometer was 1.45 kcps. The method provides reference for the examination of such instrument and measurement standard.