应用于光学测量仪器的高精度气浴恒温箱设计

High precision gas bath thermostat used in optical measuring instruments

以多普勒非对称空间外差(DASH)干涉仪为代表的精密光学测量仪器对环境温度波动非常敏感.提出了一种应用于精密光学测量仪器的高精度气浴恒温箱设计方案.该气浴温度控制系统主要由空气处理模块、气浴恒温箱体和温度测控电路组成.重点介绍了空气处理模块和气浴恒温箱体的构成原理和实现过程,并通过ANSYS热力学仿真和实验对设计进行了验证.结果表明:所设计的高精度气浴恒温箱具有良好的温度均匀性,温度控制稳定性可以达到±0.1℃,满足了DASH干涉仪工作时的恒温控制要求.

Precision optical measuring instruments,typified by the Doppler asymmetric space heterodyne（DASH）interferometer,are particularly sensitive to ambient temperature fluctuations.Therefore,a design scheme of high precision gas bath thermostat used in precision optical measuring instrument was proposed.The gas bath temperature control system is mainly composed of air treatment module,gas bath thermostat and temperature measurement and control circuit.The principle of air treatment module and the structure of the gas bath thermostat and the realization process were mainly introduced.The design was verified by ANSYS thermodynamic simulation and experiment.The results showed that the high precision gas bath thermostat had good temperature uniformity and the temperature control stability could reach ±0.1 ℃,which meets the requirement of constant temperature control during DASH interferometer work.