EBSD扫描步长对重构微观组织的影响研究

Influence of step size set in EBSD technique on the reconstructed microstructure

电子背散射衍射(EBSD)技术所获取的数据是基于逐点扫描标定的取向信息,再经取向信息统计计算后重新生成的图像,点与点之间的距离即为扫描步长。本文以溅射靶材用钽板(Ta)为研究材料,在其他各项扫描及EBSD设置参数一致的情况下,系统研究了扫描步长的改变对重构微观组织的影响。研究发现,随着扫描步长的增大,晶粒尺寸增大,大角度晶界(>30°)占比增多,而扫描步长的改变对晶粒长径比、微区织构强度等影响较小。

The microstructure is reconstructed from the orientation data which is collected by the electron backscatter diffraction（ EBSD） technique with a point-to-point step method,and the distance between adjacent two points is the step size. In this study,the sputtering target tantalum（ Ta） was set as the starting material. The influence of the change of step size on the reconstructed microstructure was systematically investigatedwith the premise that all the parameters of scanning electron microscope（ SEM） and EBSD remained unchanged through the investigation. The results showed that grain size and the volume of large angle boundaries increased with the increase of step size,but the change of step size has little influence on the aspect ratio and local texture of the material.