光栅横向剪切干涉仪系统误差的校正方法

Correction Algorithm of Systemic Errors in Grating Lateral-Shearing Interferometer

针对光栅横向剪切干涉仪研究了旋转绝对检测的方法,并用前36项Zernike多项式标定出剪切装置的系统误差非对称项。研究结果表明,将面形检测的绝对算法应用于检测镜头系统波像差,在干涉仪系统误差消除后可以达到相对理想的检测精度。实验数据的重复性的均方根可以达到0.14nm。

The rotation absolute algorithm is stuided for the grating lateral-shearing interferometer,and the first 36-term Zernike polynomials are used to characterize the asymmetric term in the systemic errors of the shearing setup.The research results show that the relatively ideal measurement precision can be obtained after the systemic errors are removed if the absolute algorithm of surface figure testing is used to the testing of wavefront aberration in lens system.In addition,the RMS of the repeatability of the experimental data can approach 0.14 nm.