摘要
石英真空计测量范围是10^(-1)Pa-10~5Pa。石英真空计的优点是传感器体积小,耗电功率小,精度较高,量程较宽,因而它将会有广泛的应用。
The pressure measuring range of quartz vacuum gauge is 10-1-10^5Pa. The characteristics of quartz vacuum gauge is small sensor volume, low power consumption, wide measurement range and high precision. Hence it has many applications.
作者
王逊
张云峰
唐振松
WANG Xun;ZHANG Yun-feng;TANG Zhen-song(Department of Electronics,Peking University,Beijing 100871,China)
出处
《真空》
CAS
2018年第4期38-41,共4页
Vacuum
关键词
石英真空计
石英晶振
谐振阻抗
quartz vacuum gauge
quartz crystal
resonance impedance
