基于高次谐波体声波谐振器的微波跳频源研究

Research on Microwave Frequency Hopping Source Based on High-Overtone Bulk Acoustic Resonator

频率信号源已经成为现代通信系统的核心部件,是决定系统性能的关键设备。采用MEMS工艺实验制备了Al-Zn O-Au-Sapphire结构的高次谐波体声波谐振器（HBAR）,基于HBAR的高Q值、多模谐振特性,研究实现了高性能的微波点频源及压控形式的跳频信号源,相对于传统的晶体振荡器和DDS＋PLL的跳频源技术,电路设计简单,所需硬件数量极少,相位噪声低。测试结果显示：微波点频源输出频率2.962 GHz,输出功率-5.15 dBm,相位噪声达到了-112dBc/Hz@10 kHz,频率稳定度≤8.9×10（-5）;跳频信号源跳频带宽56 MHz,步进频率为14 MHz,压控灵敏度为14 MHz/1.8 V,频率转换时间短,在导航、通信系统中将得到广泛应用。

Frequency signal source has become the core component of modern communication system,and it＇s the key equipment to determine system performance. A high-overtone bulk acoustic resonator（ HBAR） of Al-Zn O-Au-Sapphire structure was fabricated by using MEMS technology. Based on the high Q,multi-mode resonance of HBAR,the single frequency microwave source and voltage controlled frequency hopping signal source were researched. The simple circuit,minimal amount of hardware,and low phase noise are better than traditional crystal oscillator and DDS ＋ PLL frequency hopping source technology. The test results show that the output frequency of the microwave frequency source is 2.962 GHz,the output power is-5.15 dBm,the phase noise reaches-112 dBc/Hz@ 10 kHz,and the frequency stability is ≤8.9× 10（-5）. The frequency hopping signal source has a frequency hopping bandwidth of 56 MHz,a stepping frequency of 14 MHz,a voltage control sensitivity of 14 MHz/1.8 V,and a short frequency conversion time,which will be widely used in navigation and communication systems.