线轮廓检测设备偏差校准方法研究

Research on Deviation Calibration Method of Contour Detection Equipment

分析了线轮廓检测设备存在的偏差种类及其产生原因,提出了一种检测设备线轮廓偏差的校准方法。首先,将各偏差的初始校准值补偿至采集到的数据中,利用广义逆矩阵求解不相容线性方程组的最佳逼近解,得到轮廓线的拟合函数;然后以最小二乘原则为评定准则,计算找到最优校准值;最后将最优校准值输入到检测系统中进行偏差校准。工程中利用美国ZYGO公司的激光干涉仪测量结果作为产品轮廓线的参考值,经过该方法校准后,检测设备的测量值与参考值的误差减小约90%,可见该方法提高了测量精度。该方法已应用于某非标自动化公司中的检测设备,在工程应用中的使用进而证明了所提出的偏差校准方法可行有效。

Deviation types of linear contour equipment and its causes are analyzed. A deviation calibration method for line contour of testing equipment is presented. Firstly,the initial calibration value of each deviation is compensated separately to the collected data. Based on the generalized inverse matrix solving the optimal approximation solution of incompatible linear equations,the fitting function of the contour line is obtained. Then,the principle of least squares is used as the evaluation criteria to get the optimum calibration values. Finally,the optimum calibration values are input to the detection system for deviation calibration. To verify the method,the measurement results of the laser interferometer of ZYGO are used as the reference value of the products. After applying proposed method,the error between the measured value and the reference value is reduced by about 90%,which proves its ability for measurement precision improvement. The validity of this method has been further confirmed by its application in detection equipment application of a non-standard automation company in Suzhou.