多晶硅还原炉中硅棒的直流电加热模型

DIRECT-CURRENT ELECTRIC HEATING MODEL OF SILICON ROD IN POLYSILICON REDUCTION FURNACE

考虑西门子还原炉内对流传热、辐射传热以及化学反应热,建立24对棒西门子还原炉内硅棒直流电焦耳加热模型。研究不同分布环上硅棒增长半径、反应器壁辐射率对硅棒内部径向温度分布的影响。结果表明：随着硅棒半径的增大,位于内环和中环的硅棒中心温度先增大又减小,而外环上的硅棒内部温度分布更不均匀;增大反应器壁辐射率,硅棒中心温度逐渐增大;辐射热损失越大,反应器壁的辐射率对硅棒内部温度的影响越强。

Considering the effect of heat dissipation（convection,radiation and chemical reaction）,the Joule heating model by direct current（DC）in a 48-rod Siemens reactor have been established.The influence of the rod location,rod radius and wall emissivity on thermal distribution have been investigated.The results show that with the increase of the radius of silicon rod,the center temperature of silicon rod located in the inner ring and the middle ring increases firstly and then decreases,and the radial thermal distribution of silicon rod in the outer ring is more uneven.As the emissivity of the reactor wall increases,the center temperature of silicon rod increases gradually.With the increase of radiant heat loss,the influence of the reactor wall emissivity on the internal temperature of the silicon rod is stronger.