摘要
从智能传感器的概念和架构出发,研究了MEMS、CMOS、光谱学等主流技术智能传感器的基本发展情况。探讨了智能传感器的实现途径。列举了军用智能传感器的重点应用领域和技术。结合国内实际情况,提出关于智能传感器的发展建议。
The concepts and architectures of smart sensors technology were surveyed,and the trends of development of the smart sensors made by the processes of MEMS,CMOS and optical spectroscopy were investigated.The technology roadmap of smart sensor was discussed.The critical technologies of smart sensors in the realm of military important applications were pointed out.Having jointed the domestic reality of smart sensors technology,the optimized strategies were put forward for the developing efforts.
作者
殷毅
YIN Yi(China Electronics Technology Group Co.,Ltd.,Beijing 100864,P.R.China)
出处
《微电子学》
CAS
CSCD
北大核心
2018年第4期504-507,519,共5页
Microelectronics