柔性卷绕镀膜中薄膜平整度在线控制装置的研究

The Technology of Controlling the Online Smoothness of Flexible Thin Film Coated Thin Film

ITO(氧化铟锡)导电薄膜广泛应用于手机、平板、车载导航等触摸屏,其主要采用卷对卷真空磁控溅射设备制备而成。现在对轻、薄的要求越来越高,这就增加了卷对卷生产中比较薄的PET(23?m厚度以下)平整度控制难度,故设计出一种柔性卷绕镀膜中薄膜平整度在线控制的装置,并已在产线成功使用。

ITO （indium tin oxide） conductive film is widely used in mobile phone, plate, vehicle navigation and other touch screens. It is mainly made of roll to roll vacuum magnetron sputtering equipment. Because of the increasing demand for light and thin, this increases the evenness of PET （under 23um thickness below） in roll production. In this paper, a device for on-line control of film evenness in flexible coiling is successfully developed, and it has been used in production line.