5Berger J D, Zhang Yongwei, Grade J D, et al. Widely tun- able external cavity diode laser based on a MEMS electro- static rotary actuator [ J ]. Optical Fiber Communication Conference and Exhibit,2001,2(2) :T- u.
6Hidehisa Sameshima, Takuma Tanae, Kazuhiro Hane. A CaN electromechanical tunable grating on Si substrate [ J ]. IEEE Photonics Technology Letters, March, 201 1, 23 (5) :281 -283.
7H Sameshima,T Tanae, F Hu, et al. CaN pitch-variablegrating fabricated on Si substrate [ J ]. Optical MEMS and Nanophotonics ( OPT MEMS ), 2010 International Confer- ence on,2010:79 - 80,2010:79 - 80.
8JiaSheng YE, YOSHIAKI KANAMORI, Fangren HU, et al. Narrow-band tunable optical filters using the self-sus- pended subwavelength grating[ J ]. Journal of Modern Op- tics ,2007,54(6 ) :827 - 832.
9K Hane,T Kobayashi, F Hu, et al. Variable optical re-flec- tance of a self-supported Si grating [ J J. Applied Physics Letters,2006,88 (14) : 141109 - 141109 - 3.
10K Takahashi, E Bulgan, Y Kanamori, et al. Submicron comb-driveactuators fabricated on thin single crystalline silicon layer [ J ]. IEEE Trans. Ind. Electron, 2009, 56 (4) :991 -995.
