基于表面声波的微流控技术研究进展

Research progress of microfluidic technology based on surface acoustic waves

近年来,基于表面声波的微流控技术因为表面声波的产生与控制方式简单高效、表面声波与流体介质相互作用的形式多样,以及声波器件制备工艺简单、易于集成和检测等特点引起了广泛关注和研究。目前,基于表面声波的微流控技术在生化分析与疾病检测等领域中主要围绕细胞等微粒的排布、分离、混合与汇聚现象、声波加热、声波雾化、生物传感等方面展开研究,部分技术已接近成熟,具有发展成为便携式设备的巨大潜力,市场应用前景广阔。本文总结了近20年来表面声波微流控技术在微粒的排布、分离、混合与汇聚现象、声波加热、声波雾化、生物传感等方面的研究进展,并指出了相关研究正在由声力、声热、声电等单效应向多物理场效应转变,由二维、微米级操纵向三维、纳米级操纵转变、由平面型器件向柔性器件转变的趋势。

In recent years,the microfluidics technology based on the surface acoustic waves（SAW） has attracted a wide attention due to its many advantages such as simple and efficient generation and control of the SAW,multiple interacting forms between the SAW and the fluids,simple manufacturing process,and easy to integrate and detect.At present,as far as the biochemical analysis and the medical detection are concerned,the research of the SAW based microfluidic technology is mainly focused on the cells/particles sorting,the separation,mixing and concentration,the acoustic heating,the acoustic atomization,and the biological sensing.Some prototypes have almost reached the maturity stage,to be developed into portable devices with a huge prospective market.In this paper,the research of the microfluidic technology based on the SAW for the cells/particles sorting,separation,mixing and concentration,the acoustic heating,the acoustic atomization,the biological sensing reported in the last twenty years is reviewed,as well as the related research trend from a single effect study of acoustoforce,acoustothermal and acoustoelectric to the study of multiple physical effects,from two dimensional and micro manipulation to three dimensional and nano manipulation,and from planar device to flexible device.