Co掺杂ZnO薄膜结构及其光学性质的研究

Research on Structure and Optical Properties of Co-doped ZnO Thin Films

采用溶胶-凝胶（Sol-Gel）法生长了纯ZnO及Co单掺ZnO薄膜.利用金相显微镜观察了Zn1-xCoxO薄膜的表面形貌;同时利用X射线衍射仪（XRD）研究了掺杂浓度对其微结构的影响.结果指出,所制备的纯氧化锌及掺杂氧化锌薄膜样品均具有较好的c轴择优取向生长;实验中,我们在室温条件下进行了光致发光的测量.ZnO薄膜中掺入Co元素会改变薄膜的微结构,导致锌填隙缺陷和氧位错缺陷浓度发生变化,进而影响薄膜的禁带宽度和发光特性.现对最近几年Co掺杂ZnO薄膜的结构和光学性质进行阐述,并对今后的发展方向进行了展望.

ZnO and Co-doped ZnO thin films were deposited by means of sol-gel method. In the test,the surface morphologies of Zn1-xCoxO films have been observed through metalloscope. Meanwhile,we studied the influence of doping concentration on the microstructures of thin films by X-ray diffraction（XRD）. It turns out that all the ZnO samples show preferential orientation along C axis. And We made photoluminescence measurements at room temperature. ZnO thin film adding Co elements will change the film microstructure,which will make zinc interstitial defects and oxygen concentration change,influencing the band gap and luminescencecharacters. The structures and luminescence properties of Co-doped ZnO thin films will be introduced in detaisl in this paper. Its application fields and the future research direction will also be prospected.