采用离子注入法对金属表面改性专利技术综述

Patent Overview of Metal Surface Modification by Ion Implantation

离子注入技术属原子级表面加工技术, 其具备改性效果明显、 效率高、 可控性和可操作性强、无污染等优点, 在金属材料、 半导体器件、 医用抗菌等众多领域应用广泛.本文分析了采用离子注入法对金属表面改性的国内外专利申请文献, 分析了该领域的专利申请量, 归纳出申请人国别和应用领域分布, 同时对该领域未来发展趋势进行了预测.

Ion implantation technology is atomic level surface processing technology, which has the advan？ tages of obvious modification effect, high efficiency, controllability and operability, and no pollution. It is wide？ ly used in many fields such as metal materials, semiconductor devices, and medical antibacterial. This article analyzed the domestic and foreign patent application literatures that use ion implantation to modify metal sur？ faces, analyzed the number of patent applications in this field, summarized the distribution of applicant country and application fields , and predicted the future development trend of the field.