球坐标测量系统几何误差辨识及补偿方法

Identification and Compensation Method for Position-independent Geometric Error of Spherical Coordinate Measuring System

几何误差是影响球坐标测量系统精度的重要因素,误差补偿技术是提高其测量精度的有效方法。本文针对球坐标测量系统几何误差辨识及补偿问题,提出一种基于高精度球面靶标标定的误差辨识方法。首先,基于Denavit-Hartenberg方法建立球坐标测量系统误差模型;其次,分析基于高精度球面靶标标定的误差辨识原理;最后,运用该标定方法进行几何误差辨识仿真试验,并具体分析影响误差辨识精度的因素。仿真结果表明,基于高精度球面靶标的标定方法可以辨识出7项几何误差,经过误差辨识和补偿能够提高球坐标测量系统的球面面形测量精度。

Geometric error is an important factor affecting the accuracy of spherical coordinate measurement system, and error compensation is an effective method to improve its measurement accuracy. Aiming at the problem of position-independent geometric errors identification and compensation of spherical coordinate measuring system, a calibration method based on high precision spherical target is proposed. Firstly, the error model is established. Secondly, the error identification principle based on the high precision spherical target calibration method is analyzed. Finally, the calibration method is used to simulate the position-independent geometric errors, and the factors that influence the accuracy of error identification are analyzed concretely. The simulation results show that the seven position-independent geometric errors can be identified based on the calibration method. Through the position-independent geometric errors identification and compensation, the spherical surface measurement accuracy of the spherical coordinate measuring system can be highly improved.