硅微机械陀螺驱动方式研究

Research on Driving Methods of Silicon Micro-machined Gyroscope

硅微机械陀螺因其体积小、质量轻、集成度高、功耗低等优良性能特点,已经在军事及民用领域有着非常广泛的应用。为将角度率转换为电信号,需要驱动硅微机械陀螺的质量块进行振荡,采取的驱动方式不同对整个微机械陀螺系统的性能有着非常重要的影响。本文对硅微机械陀螺的驱动方式的分类、原理和优劣势等进行研究。

Silicon Micro-machined Gyroscope （SMG）has been widely used in both military and civilian fields for its advantages such as small size,light weight,high integration and low power consumption. In order to convert the angular rate into electrical signal, the mass of SMG needs to be driven to oscillate. Different driving modes have a very important impact on the performance of the entire SMG system. The classification, principle and advantages and disadvantages of driving methods of SMG are studied in this paper.