一种用于抑制相移误差和零级串扰的相移算法通用设计方法（英文）

A general method of designing phase-shifting algorithms for grating lateral shearing interferometry

为降低零级串扰和相移误差对光栅横向剪切干涉仪波前复原精度的影响,进一步提升光栅横向剪切干涉仪检测光刻镜头系统波像差精度,推导出一种设计光栅剪切干涉相移算法的一般表达式,给出相移算法的具体设计方法。根据该表达式和设计方法,可以针对不同的零级串扰和相移误差建立相应的4种相移算法,实现高精度系统波像差检测。同时设计和评价了一种新的13步相移算法,结果证明所推导的一般表达式的有效性和先进性。

We propose a general method of designing phase-shifting algorithms for grating lateral shearing interferometry. The algorithms compensate for the zeroth-order effect error and phase-shifting error in varying degrees. We derive a general expression of the phase-shifting algorithm in grating lateral shearing interferometer and introduce the corresponding design method. Based on the expression and method, four phase-shifting algorithms are designed with different phase-shifting errors to obtain high measurement accuracy. A new 13-frame phase-shifting algorithm is designed and simulated with a large zeroth-order effect. Simulation results verify the general expression and the corresponding design method.