飞秒激光制备高敏感度流量传感器

Flow Sensor with High Sensitivity Fabricated by Femtosecond Laser

利用飞秒激光双光子直写技术,在微流控芯片内部集成了一款三维(3D)弹簧状流量传感器。加工的弹簧状流量传感器可以循环拉伸多次,且变形可逆。另外,不同的激光曝光能量能够加工不同厚度的弹簧状流量传感器,从而可以检测出不同范围的流速,最小可检测10-12量级的流速。该流量传感器可以用于多种微流控器件中,尤其适用于需要将流速检测与微流控器件结合的场合以及超低流速的检测应用中。

A three-dimensional（3 D）spring-like flow sensor is integrated inside the microfluidic chip by using the femtosecond laser two-photon direct writing technique.The fabricated spring-like flow sensor can be stretched repeatedly for several times,and the deformation is reversible.In addition,different laser exposure powers can be adopted to fabricate the spring-like flow sensors with different thicknesses,and thus flow rates within different ranges can be monitored and the minimum flow rate which can be monitored is at 10-12 level.This flow sensor can be used in many kinds of microfluidic devices,especially in situations where the flow rate detection is required to be combined with other microfluidic devices and in the ultralow flow rate detection.